Leads the world’s semiconductor technology with vigorous energy and imagination

CVD SiC Components

Manufactured with CVD process to improve life time and yield for parts used in Dry etcher and Diffusion chamber.
SiC Ring
Dummy Wafer
Shower Head


  • SiC Ring
  • SiC Shower Head
  • SiC Dummy Wafer


  • No heat deformation
  • No outgassing
  • Long lifetime compared with Si
  • Excellent chemical resistance

Material Properties of SiC

Material properties
Field of use Semiconductor Equipment Ceramic Jig (Focus Ring, SiC Wafer)
Major Features Ultra high purity, Excellent Plasma resistance
Properties Purity >99.9999%
Density (g/cm 3) 3.21
Thermal conductivity (W/m-K) 200 ~ 360
Coefficient of thermal expansion(/℃) 4.5~5
Hardness (kg/mm 2) 2900~3300
Resistivity [Ωcm] 0.1~15,000
Corrosion resistance, (HCl)[2300 ℃] x